diff --git a/be/src/exec/olap_scan_node.cpp b/be/src/exec/olap_scan_node.cpp
index b1099fb0c6..9ab9e0a520 100644
--- a/be/src/exec/olap_scan_node.cpp
+++ b/be/src/exec/olap_scan_node.cpp
@@ -1252,6 +1252,13 @@ void OlapScanNode::transfer_thread(RuntimeState* state) {
     }
     // read from scanner
     while (LIKELY(status.ok())) {
+        // When query cancel, _transfer_done is set to true at OlapScanNode::close,
+        // and the loop is exited at this time, and the current thread exits after
+        // waiting for _running_thread to decrease to 0.
+        if (UNLIKELY(_transfer_done)) {
+            LOG(INFO) << "Transfer thread cancelled, wait for the end of scan thread.";
+            break;
+        }
         int assigned_thread_num = 0;
         // copy to local
         {
@@ -1361,6 +1368,15 @@ void OlapScanNode::transfer_thread(RuntimeState* state) {
 }
 
 void OlapScanNode::scanner_thread(OlapScanner* scanner) {
+    if (UNLIKELY(_transfer_done)) {
+        _scanner_done = true;
+        std::unique_lock<std::mutex> l(_scan_batches_lock);
+        _running_thread--;
+        _scan_batch_added_cv.notify_one();
+        _scan_thread_exit_cv.notify_one();
+        LOG(INFO) << "Scan thread cancelled, cause query done, scan thread started to exit";
+        return;
+    }
     int64_t wait_time = scanner->update_wait_worker_timer();
     // Do not use ScopedTimer. There is no guarantee that, the counter
     // (_scan_cpu_timer, the class member) is not destroyed after `_running_thread==0`.
diff --git a/be/src/exec/olap_scan_node.h b/be/src/exec/olap_scan_node.h
index e643e1b5a0..f0c6695b6c 100644
--- a/be/src/exec/olap_scan_node.h
+++ b/be/src/exec/olap_scan_node.h
@@ -18,6 +18,7 @@
 #ifndef DORIS_BE_SRC_QUERY_EXEC_OLAP_SCAN_NODE_H
 #define DORIS_BE_SRC_QUERY_EXEC_OLAP_SCAN_NODE_H
 
+#include <atomic>
 #include <boost/thread.hpp>
 #include <boost/variant/static_visitor.hpp>
 #include <condition_variable>
@@ -245,8 +246,9 @@ private:
 
     int _max_materialized_row_batches;
     bool _start;
-    bool _scanner_done;
-    bool _transfer_done;
+    // Used in Scan thread to ensure thread-safe
+    std::atomic_bool _scanner_done;
+    std::atomic_bool _transfer_done;
     size_t _direct_conjunct_size;
 
     int _total_assign_num;