diff --git a/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterContext.java b/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterContext.java
index 05467588f8..4360e5659c 100644
--- a/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterContext.java
+++ b/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterContext.java
@@ -121,17 +121,17 @@ public class RuntimeFilterContext {
     // you can see disjoint set data structure to learn the processing detailed.
     private final Map<NamedExpression, Pair<PhysicalRelation, Slot>> aliasTransferMap = Maps.newHashMap();
 
-    private final Map<Slot, ScanNode> scanNodeOfLegacyRuntimeFilterTarget = Maps.newHashMap();
+    private final Map<Slot, ScanNode> scanNodeOfLegacyRuntimeFilterTarget = Maps.newLinkedHashMap();
 
     private final Set<Plan> effectiveSrcNodes = Sets.newHashSet();
 
     // cte to related joins map which can extract common runtime filter to cte inside
-    private final Map<CTEId, Set<PhysicalHashJoin>> cteToJoinsMap = Maps.newHashMap();
+    private final Map<CTEId, Set<PhysicalHashJoin>> cteToJoinsMap = Maps.newLinkedHashMap();
 
     // cte candidates which can be pushed into common runtime filter into from outside
     private final Map<PhysicalCTEProducer, Map<EqualTo, PhysicalHashJoin>> cteRFPushDownMap = Maps.newLinkedHashMap();
 
-    private final Map<CTEId, PhysicalCTEProducer> cteProducerMap = Maps.newHashMap();
+    private final Map<CTEId, PhysicalCTEProducer> cteProducerMap = Maps.newLinkedHashMap();
 
     // cte whose runtime filter has been extracted
     private final Set<CTEId> processedCTE = Sets.newHashSet();
diff --git a/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterGenerator.java b/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterGenerator.java
index bae483c293..45a14d3b63 100644
--- a/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterGenerator.java
+++ b/fe/fe-core/src/main/java/org/apache/doris/nereids/processor/post/RuntimeFilterGenerator.java
@@ -71,6 +71,7 @@ import java.util.Arrays;
 import java.util.HashMap;
 import java.util.HashSet;
 import java.util.LinkedHashMap;
+import java.util.LinkedHashSet;
 import java.util.List;
 import java.util.Map;
 import java.util.Set;
@@ -392,7 +393,7 @@ public class RuntimeFilterGenerator extends PlanPostProcessor {
     private void collectPushDownCTEInfos(PhysicalHashJoin<? extends Plan, ? extends Plan> join,
             CascadesContext context) {
         RuntimeFilterContext ctx = context.getRuntimeFilterContext();
-        Set<CTEId> cteIds = new HashSet<>();
+        Set<CTEId> cteIds = new LinkedHashSet<>(); // use LinkedHashSet to make runtime filter order stable
         PhysicalPlan leftChild = (PhysicalPlan) join.left();
         PhysicalPlan rightChild = (PhysicalPlan) join.right();
 
@@ -404,7 +405,8 @@ public class RuntimeFilterGenerator extends PlanPostProcessor {
         if ((leftHasCTE && !rightHasCTE) || (!leftHasCTE && rightHasCTE)) {
             for (CTEId id : cteIds) {
                 if (ctx.getCteToJoinsMap().get(id) == null) {
-                    Set<PhysicalHashJoin> newJoin = new HashSet<>();
+                    // use LinkedHashSet to make runtime filter order stable
+                    Set<PhysicalHashJoin> newJoin = new LinkedHashSet<>();
                     newJoin.add(join);
                     ctx.getCteToJoinsMap().put(id, newJoin);
                 } else {
diff --git a/regression-test/data/nereids_tpcds_shape_sf1000_p0/shape/query95.out b/regression-test/data/nereids_tpcds_shape_sf1000_p0/shape/query95.out
index 6720aab10b..c50e58dd00 100644
--- a/regression-test/data/nereids_tpcds_shape_sf1000_p0/shape/query95.out
+++ b/regression-test/data/nereids_tpcds_shape_sf1000_p0/shape/query95.out
@@ -21,14 +21,14 @@ PhysicalCteAnchor ( cteId=CTEId#0 )
 ------------------PhysicalProject
 --------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = web_returns.wr_order_number)) otherCondition=()
 ----------------------PhysicalProject
-------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF6 wr_order_number->[ws_order_number,ws_order_number]
+------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF7 wr_order_number->[ws_order_number,ws_order_number]
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalOlapScan[web_returns]
-----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF7 ws_order_number->[ws_order_number,ws_order_number]
+----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF6 ws_order_number->[ws_order_number,ws_order_number]
 ------------------------PhysicalDistribute
 --------------------------PhysicalProject
 ----------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
diff --git a/regression-test/data/nereids_tpcds_shape_sf100_p0/noStatsRfPrune/query95.out b/regression-test/data/nereids_tpcds_shape_sf100_p0/noStatsRfPrune/query95.out
index d2ecc4813b..9fb38391e5 100644
--- a/regression-test/data/nereids_tpcds_shape_sf100_p0/noStatsRfPrune/query95.out
+++ b/regression-test/data/nereids_tpcds_shape_sf100_p0/noStatsRfPrune/query95.out
@@ -21,14 +21,14 @@ PhysicalCteAnchor ( cteId=CTEId#0 )
 ------------------PhysicalProject
 --------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = web_returns.wr_order_number)) otherCondition=()
 ----------------------PhysicalProject
-------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF6 wr_order_number->[ws_order_number,ws_order_number]
+------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF7 wr_order_number->[ws_order_number,ws_order_number]
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalOlapScan[web_returns]
-----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF7 ws_order_number->[ws_order_number,ws_order_number]
+----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF6 ws_order_number->[ws_order_number,ws_order_number]
 ------------------------PhysicalDistribute
 --------------------------PhysicalProject
 ----------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
diff --git a/regression-test/data/nereids_tpcds_shape_sf100_p0/no_stats_shape/query95.out b/regression-test/data/nereids_tpcds_shape_sf100_p0/no_stats_shape/query95.out
index d2ecc4813b..9fb38391e5 100644
--- a/regression-test/data/nereids_tpcds_shape_sf100_p0/no_stats_shape/query95.out
+++ b/regression-test/data/nereids_tpcds_shape_sf100_p0/no_stats_shape/query95.out
@@ -21,14 +21,14 @@ PhysicalCteAnchor ( cteId=CTEId#0 )
 ------------------PhysicalProject
 --------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = web_returns.wr_order_number)) otherCondition=()
 ----------------------PhysicalProject
-------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF6 wr_order_number->[ws_order_number,ws_order_number]
+------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF7 wr_order_number->[ws_order_number,ws_order_number]
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalOlapScan[web_returns]
-----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF7 ws_order_number->[ws_order_number,ws_order_number]
+----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF6 ws_order_number->[ws_order_number,ws_order_number]
 ------------------------PhysicalDistribute
 --------------------------PhysicalProject
 ----------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
diff --git a/regression-test/data/nereids_tpcds_shape_sf100_p0/rf_prune/query95.out b/regression-test/data/nereids_tpcds_shape_sf100_p0/rf_prune/query95.out
index bde9dbef39..acee79a67e 100644
--- a/regression-test/data/nereids_tpcds_shape_sf100_p0/rf_prune/query95.out
+++ b/regression-test/data/nereids_tpcds_shape_sf100_p0/rf_prune/query95.out
@@ -21,14 +21,14 @@ PhysicalCteAnchor ( cteId=CTEId#0 )
 ------------------PhysicalProject
 --------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = web_returns.wr_order_number)) otherCondition=()
 ----------------------PhysicalProject
-------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF6 wr_order_number->[ws_order_number,ws_order_number]
+------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF7 wr_order_number->[ws_order_number,ws_order_number]
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalOlapScan[web_returns]
-----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF7 ws_order_number->[ws_order_number,ws_order_number]
+----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF6 ws_order_number->[ws_order_number,ws_order_number]
 ------------------------PhysicalDistribute
 --------------------------PhysicalProject
 ----------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
diff --git a/regression-test/data/nereids_tpcds_shape_sf100_p0/shape/query95.out b/regression-test/data/nereids_tpcds_shape_sf100_p0/shape/query95.out
index bde9dbef39..acee79a67e 100644
--- a/regression-test/data/nereids_tpcds_shape_sf100_p0/shape/query95.out
+++ b/regression-test/data/nereids_tpcds_shape_sf100_p0/shape/query95.out
@@ -21,14 +21,14 @@ PhysicalCteAnchor ( cteId=CTEId#0 )
 ------------------PhysicalProject
 --------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = web_returns.wr_order_number)) otherCondition=()
 ----------------------PhysicalProject
-------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF6 wr_order_number->[ws_order_number,ws_order_number]
+------------------------hashJoin[INNER_JOIN] hashCondition=((web_returns.wr_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF5 wr_order_number->[ws_order_number];RF7 wr_order_number->[ws_order_number,ws_order_number]
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalCteConsumer ( cteId=CTEId#0 )
 --------------------------PhysicalDistribute
 ----------------------------PhysicalProject
 ------------------------------PhysicalOlapScan[web_returns]
-----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF7 ws_order_number->[ws_order_number,ws_order_number]
+----------------------hashJoin[RIGHT_SEMI_JOIN] hashCondition=((ws1.ws_order_number = ws_wh.ws_order_number)) otherCondition=() build RFs:RF4 ws_order_number->[ws_order_number];RF6 ws_order_number->[ws_order_number,ws_order_number]
 ------------------------PhysicalDistribute
 --------------------------PhysicalProject
 ----------------------------PhysicalCteConsumer ( cteId=CTEId#0 )